MAS3012
Capacitive
Analog Output
1 or 3
Low Noise: 1ug
Chip
ISO
Non-Customized
Voltage
7~24V or 5V+-3%
-40~+85degrees Celsius
SkyMEMS
Carton
37*30*25mm
China
9014100000
Product Description
MAS3012 High Performance 1ug 3 Axis MEMS Accelerometer
Main Features
- Closed Loop Structure MEMS Capacitive Accelerometer
- Range:±2g,±5g, ±10g, ±30g, Excellent Bias Stability
- Dynamic Range: ≥110dB,
- Bandwidth: MAS3012-2 ≥1KHz (Typical Value, -3dB)
- Low Noise: MAS3012-2≤1.0μgrms/√Hz
- Non-linearity: 0.1%FS (Full Range)
- Extremely Reliable in Harsh Environment
- Wide Operating Temperature Range: -40~+85ºC
Brief Introduction
MS3012 single/dual/tri-axial MEMS accelerometer sensor is one type of high performance vibration
monitoring sensor base on MEMS technologies. It adopts 7~24V or 5V±3% power supply, integrate X-Y-Z
trial axes and self test function, it adopts high performance accelerometer, the dynamic range can reach
110dB.
MS3012 accelerometer sensor has passed the strictest tests, it enjoys excellent performance in noise,
dynamic range, non-linearity, repeatability, temperature drift, shock proof, etc. this product is an ideal option
for seismic monitor, vibration monitoring, high speed train/metro train, test platform of vibration and
shocking, structure health monitoring, etc.
Technical Specifications
Typical Applications
- Seismic Monitor
- Micro-vibration Monitoring
- Inertial Navigation
- Structure/Building Monitoring
- Platform Stability
Heart and Fast Service
Main Features
- Closed Loop Structure MEMS Capacitive Accelerometer
- Range:±2g,±5g, ±10g, ±30g, Excellent Bias Stability
- Dynamic Range: ≥110dB,
- Bandwidth: MAS3012-2 ≥1KHz (Typical Value, -3dB)
- Low Noise: MAS3012-2≤1.0μgrms/√Hz
- Non-linearity: 0.1%FS (Full Range)
- Extremely Reliable in Harsh Environment
- Wide Operating Temperature Range: -40~+85ºC
Brief IntroductionMS3012 single/dual/tri-axial MEMS accelerometer sensor is one type of high performance vibration
monitoring sensor base on MEMS technologies. It adopts 7~24V or 5V±3% power supply, integrate X-Y-Z
trial axes and self test function, it adopts high performance accelerometer, the dynamic range can reach
110dB.
MS3012 accelerometer sensor has passed the strictest tests, it enjoys excellent performance in noise,
dynamic range, non-linearity, repeatability, temperature drift, shock proof, etc. this product is an ideal option
for seismic monitor, vibration monitoring, high speed train/metro train, test platform of vibration and
shocking, structure health monitoring, etc.
Technical Specifications
| Parameter | MS3012-02 | MS3012-05 | MS3012-10 | MS3012-30 | Unit |
| Range | ±2 | ±5 | ±10 | ±30 | g |
| Zero Bias | ±20 | ±20 | ±20 | ±20 | mV |
| Scale Factor Sensitivity (Differential Output ) | 1800±20 | 720±20 | 360±20 | 120±20 | mV/g |
| Bandwidth (-3dB) | 1000 | 200 | 200 | 200 | Hz |
| Output Noise | 1 | 1.5 | 3.5 | 4 | μg/√Hz |
| Non-linearity | 0.1 | 0.1 | 0.1 | 0.1 | % |
| Cross-axes Influence | 3 | 3 | 3 | 3 | % |
| Bias Temperature Coefficient | ±0.2 | ±0.2 | ±0.2 | ±0.2 | mg/ ºC |
| Scale Factor Temperature Coefficient | 120 | 120 | 120 | 120 | ppm/ ºC |
| Parameter | Value | Remarks | |||
| Self Test Function | |||||
| Frequency | 19Hz | Square wave output | |||
| Duty Ratio | 0.5 | ||||
| Amplitude | 0.8g | Peak value | |||
| Single/Trixial Self Test Threshold Voltage | 4Vmin 5Vmax | High level is valid | |||
| Accelerometer Output | |||||
| Output Voltage (Differential Output ) | 0~ ±3.6V OutP :0.5~4.5V OutN: 0.5~4.5V | OutP, OutN full range output | |||
| Electrical Specs | |||||
| Working Voltage | 7~24V or 5V±3% | ||||
| Working Current | ≤25mA | Three axes | |||
| Startup Time | 20ms | ||||
| Environment Performance | |||||
| Operating Temperature | -40~+85°C | ||||
| Storage Temperature | -55~+125°C | ||||
| Shock Resistance | 6000g | ||||
| Physical Specs | |||||
| Dimensions | 37×30×25mm | ||||
| Casing | aluminum alloy | ||||
| Weight | 30grams (without lines),76 grams (with lines) | ||||
Typical Applications
- Seismic Monitor
- Micro-vibration Monitoring
- Inertial Navigation
- Structure/Building Monitoring
- Platform Stability
Heart and Fast Service
